HANBELL 漢鐘

產品
漢鐘全系列 Dry Pumps PS80, PS160, PS180, PS602, PS1302, PS1802, PS602, PS3002
PS Series Technical Specification :
Unit | PS80 | PS160 | PS180 | PS602 | PS902 | PS1302 | PS1802 | |
Pumping Speed 抽氣效率 50Hz/60Hz | l/min | 1300/1600 | 2150/2600 | 2500/3000 | 8300/10000 | 12500/15000 | 17500/21000 | 25000/30000 |
m3/hr | 80/96 | 130/156 | 150/180 | 500/600 | 750/900 | 1050/1260 | 1500/1800 | |
cfm | 45/57 | 77/92 | 88/106 | 294/353 | 441/530 | 618/742 | 883/1060 | |
Ultimate Pressure 終極壓力 | Torr | 7.5x10-3 | 7.5x10-4 | |||||
mbar | 1x10-2 | 1x10-3 | ||||||
Pa | 1 | 0.1 |
PD Series Technical Specification :
Unit | PD120 | PD300 | PDE800 | PD702 | PD1402 | PD1902 | PDE3102 | |
Pumping Speed 抽氣效率 50Hz/60Hz | l/min | 1336/2000 | 4500/5500 | 11100/13330 | 9700/12000 | 19400/23000 | 26000/31000 | 14500/50000 |
m3/hr | 80/120 | 270/330 | 660/800 | 580/700 | 1100/1400 | 1580/1900 | 2500/3000 | |
cfm | 47/70 | 160/195 | 393/478 | 340/400 | 680/800 | 930/1110 | 1470/1700 | |
Ultimate Pressure 終極壓力 | Torr | 7.5x10-3 | 7.5x10-4 | |||||
mbar | 1x10-2 | 1x10-3 | ||||||
Pa | 1 | 0.1 |
Unit | IPH 100 | IPH 200 | IPH 610 | IPH 1210 | IPH 1220 | IPH 1820 | |
Pumping Speed 抽氣效率 50Hz/60Hz | m3/hr | 120 | 200 | 700 | 1100 | 1250 | 1850 |
Ultimate Pressure 終極壓力 | Torr | 7.5x10-3 | 7.5x10-4 | ||||
mbar | 1x10-2 | 1x10-3 | |||||
Pa | 1 | 0.1 |
PMF Series Technical Specification :
Unit | PMF 100 | PMF 312 | IPH 1220 | |
Pumping Speed 抽氣效率 50Hz/60Hz | m3/hr | 100 | 327 | 1250 |
Ultimate Pressure 終極壓力 | Torr | 7.5x10-3 | 7.5x10-4 | |
mbar | 1x10-2 | 1x10-3 | ||
Pa | 1 | 0.1 |
PA-微油螺杆真空泵(廠務真空泵)
特點
- 台灣製
- 排氣路徑短,減少反應物沉積
- 線型密封性佳,幫浦性能最優
- 結構簡單,故障率低,維修容易
- 水冷密封馬達設計,安全性百分百
- 微電腦操作,遠端監控,保護周全
應用
熱處理 Thermal Proecss
真空鍍膜 Vacuum Coating
冶金系統 Matallurgical System
濺鍍製程 Sputtering
乾燥處理 Dryomg Process
製程氣體抽取 Degassing
太陽能層壓 Solar Lamination
太陽能鍍膜應用 PECVD & PVD for solar cell